Funct. Mater. 2020; 27 4: 736-743.

doi:https://doi.org/10.15407/fm27.04.736

Structural engineering of multi-period (TiMo)N/ZrN vacuum arc coatings

O.V.Sobol¹, N.V.Pinchuk¹, A.A.Meylekhov¹, V.V.Subbotina¹, Osman Dur², V.A.Stolbovoy³, D.V.Kovteba³

¹National Technical University Kharkiv Polytechnic Institute, 2 Kyrpychova St., 61002 Kharkiv,Ukraine
²Hacettepe University Technopolis, Universiteler Mahallesi 1596. Cadde 6. F-Book Kat:3 Beytepe, 06800 Ankara, Turkey
³National Science Center Kharkiv Institute of Physics and Technology, 1 Akademicheskaya St., 61108 Kharkiv, Ukraine

Abstract:

The effect of the bias potential applied to the substrate during deposition and the layer thickness on the elemental composition, structure, substructure, and stress-strain state of (TiMo)N/ZrN layers of multi-period coatings is studied. The results of elemental analysis indicate a decrease in the ratio (Ti + Mo)/Zr with an increase in the bias potential and with a decrease in the layer thickness. At the structural level, appearance of additional diffraction peaks for (TiMo)N/ZrN coatings with the thinnest (about 12 nm) layers was revealed. The appearance of such peaks is explained by the effect of mixing at the interface between layers due to the implantation of accelerated particles. It was found that alloying of Ti with Mo atoms in (TiMo)N layers leads to a large compression strain (about 5 %). In monometallic ZrN layers, the value of macrostrain is more than 2 times smaller. At the substructural level, the formation of (TiMo)N solid solution also leads to higher microdeformation in comparison with a similar parameter in ZrN monometallic layers. The hardness of multi-period (TiMo)N/ZrN composites reaches a high value of 35 GPa.

Keywords:

structural engineering, vacuum arc technology, coating, Layer thickness, bias potential, structure, substructure, stress-strain state, hardness.

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Funct. Mater. 2020; 27 4: 736-743.

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