Reproducible production of gas-sensitive SnO2 films using magnetron sputtering

V.A.Novikov

Kharkiv State Polytechnic University, 21 Frunze St., 61002 Kharkiv, Ukraine

Received March 25, 1999

Dependence of electrical properties on technologic parameters has been studied for gas-sensitive SnO2 layers prepared by magnetron sputtering. It has been shown that it is possible to control the initial conductance and gas sensitivity of those layers. A method has been proposed to improve the reproducibility of the mentioned parameters on the level necessary for practical application of adsorbing semiconductor gas sensors based on thin SnO2 films.

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