Effect of deposition conditions on electron transitions in
diamondlike carbon filmsV.M.Puzikov
Institute for Single Crystals, National Academy of Sciences of Ukraine, 60 Lenin Ave.,
310001 Kharkiv, Ukraine
Received June 19, 1998
Diamondlike carbon films (DLF) were prepared
by ion beam deposition of low-energy (30-300eV) carbon ions in a high vacuum (N 10-3 Pa)
at a rate of 3-110 A/min. The sp-3 component content in the films exceeded 80 %. Structure
and optical studies of films prepared at different deposition rates allowed to determine
conditions for predominant formation of sp-3 hexagonal modification. These
conditions are realized at the carbon condensation rates higher than 50 A/min, the other
conditions being optimum for DLF formation with a high concentration of sp-3 hybridized
carbon atoms.